| Partner institution: |
10:VilniusUniversity-FacultyofMedicine |
| Core facility: |
Life Sciences Center |
| Category of instrument / technology: |
Thin film deposition system, KJLC PVD 75 |
| Web category: |
5 : specific systems |
| Instrument name: |
Thin film deposition system, KJLC PVD 75, Kurt J. Lesker Company LtD |
| Description EN: |
The equipment is used for magnetronic deposition of metals (chromium and gold) on various film thickness under pressure control. Chamber volume is 75 liters; Sampler holder - 30 cm in diameter; Magnetron target size (diameter) 50.8 mm wit the deposition chimney; Heating up to 350 ˚C; Basic chamber pressure 2x10-7 Torr. |
| Part of research platform: |
/ |
| Name of instrument operator: |
Danute Kureckiene |
| Email of instrument operator: |
danute.kureckiene@bchi.vu.lt |
| Supplier name: |
Kurt J. Lesker Company LtD |
| Price (excluding VAT) in EUR: |
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| Year of purchase: |
2012 |
| Year of installation: |
2012 |
| Service contract Yes / No: |
0 |
| Yearly price of service contract (excluding VAT) in EUR: |
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| Capacity used in %: |
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| Running cont per hour of usage in EUR: |
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| Notes: |
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| Tags: |
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